Molecular Dynamics Study on Young's modulus of Silicon Nanostructures at finite temperature
- Author
- WANG, Yabin1 ; YU, Hong1 ; LU, Libing1 ; TAN, Yiyun1
[1] Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, Jiangsu, 210096, China - Conference title
- International Symposium on Photoelectronic Detection and Imaging 2009 (Material and device technology for sensors : 17-19 June 2009, Beijing China)
- Conference name
- International Symposium on Photoelectronic Detection and Imaging (Beijing 2009)
- Author (monograph)
- Chen, Xu-yuan (Editor)
China Aerospace Science and Industry Corporation, Tianjin Jinhang Institute of Technical Physics, China (Organiser of meeting)
Zhongguo yu hang xue hui, Photoelectric Technology Professional Committee, China (Organiser of meeting)
SPIE, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7381 ; 73812U.1-73812U.7 ; ref : 19 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-7662-3 0-8194-7662-5
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Capteur Déformation mécanique Effet température Nanofil Nanostructure Reconstruction surface Silicium 0130C 0707D
- Keyword (en)
- Sensors Strains Temperature effects Nanowires Nanostructures Surface reconstruction Silicon
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Discipline
- Metrology Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22173047
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.836706 
https://dx.doi.org/10.1117/12.836706
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