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The complete acquisition of the topography of a special multi-mirror arrangement with the help of a Fizeau interferometer

Author
XU, H1 ; MÜLLER, A1 ; BALZER, F1 ; PERCLE, B1 ; MANSKE, E1 ; JÄGER, G1
[1] Ilmenau University of Technology, Postfach 100 565, Ilmenau, Germany
Conference title
Optical measurement systems for industrial inspection VI (15-18 June 2009, Munich, Germany)
Conference name
Optical measurement systems for industrial inspection (06 ; Munich 2009)
Author (monograph)
Lehmann, Peter H (Editor)
SPIE Europe (Organiser of meeting)
European Optical Society (Organiser of meeting)
Wissenschaftliche Gesellschaft Lasertechnik, Germany (Organiser of meeting)
SPIE, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7389 ; 73890O.1-73890O.10 ; 2 ; ref : 12 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-7672-2 0-8194-7672-2
Scientific domain
Electronics; Metrology and instrumentation; Optics; Physics
Publisher
SPIE, Bellingham, Wash
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Application industrielle Erreur mesure Interférométrie optique Miroir Méthode mesure Méthode optique Positionnement Topographie 0130C 0760 0760L
Keyword (en)
Industrial application Measurement errors Light interferometry Mirrors Measuring methods Optical method Positioning Topography
Keyword (es)
Aplicación industrial Método óptico
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques / 001B00G60L Interferometers

Discipline
Metrology Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
22180097

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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