Fabrication of three-dimensional microchannels inside silicon using a femtosecond laser
- Author
- CUNXIA LI1 ; TAO CHEN1 ; JINHAI SI1 ; FENG CHEN1 ; XU SHI1 ; XUN HOU1
[1] Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shannxi Key Lab of Information Photonic Technique, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xianning-xilu 28, Xi'an, 710049, China - Source
Journal of micromechanics and microengineering (Print). 2009, Vol 19, Num 12 ; 125007.1-125007.4 ; ref : 17 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Effet photoinduit Endommagement surface Femtoseconde Fluidique Longueur onde Monocristal Nanotechnologie Silicium Microfluidique
- Keyword (en)
- Photoinduced effect Surface damage Femtosecond Fluidics Wavelengths Monocrystals Nanotechnology Silicon Microfluidics
- Keyword (es)
- Efecto fotoinducido Femtosegundo Microfluídico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G85 Applied fluid mechanics / 001B40G85D Fluidics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology Physics : fluid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22204411
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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