The Ge condensation technique: A solution for planar SOI/GeOI co-integration for advanced CMOS technologies?
- Author
- VINCENT, B1 ; DAMLENCOURT, J. F1 ; CAMPIDELLI, Y2 ; ROUCHON, D1 ; MERMOUX, M4 ; DELEONIBUS, S1 ; BENSAHEL, D2 ; BILLON, T1 ; MORAND, Y2 ; POUYDEBASQUE, A1 ; LE ROYER, C1 ; CLAVELIER, L1 ; DECHOUX, N2 ; RIVALLIN, P1 ; NGUYEN, T3 ; CRISTOLOVEANU, S3
[1] CEA-LETI Minatec, 17 rue des Martyrs, 38054 Grenoble, France
[2] STMicroelectronics, 350 Avenue J. Monnet, 38926 Crolles, France
[3] IMEP, INP Grenoble-Minatec, BP 257, 38016 Grenoble, France
[4] LEPMI/ENSEEG/INPG, 1130 Rue de la Piscine, 38402 St Martin d'Hères, France - Conference title
- E-MRS 2008 Spring Conference Symposium J: Beyond Silicon Technology: Materials and Devices for Post-Si CMOS
- Conference name
- European MRS 2008 Spring Meeting. Symposium on Beyond Silicon Technology: Materials and Devices for post-Si CMOS (Strasbourg 2008-05-26)
- Author (monograph)
- CLAEYS, Cor (Editor)1 ; PEAKER, Tony (Editor)1 ; FOMPEYRINE, Jean (Editor)1 ; FRANK, Martin (Editor)1 ; VANHELLEMONT, Jan (Editor)1
European Material Research Society (E-MRS), Strasbourg, France (Organiser of meeting)
[1] IMEC, SPDT, Kapeldreef 75, 3001 Leuven, Belgium - Source
Materials science in semiconductor processing. 2008, Vol 11, Num 5-6, pp 205-213, 9 p ; ref : 37 ref
- ISSN
- 1369-8001
- Scientific domain
- Electronics; Condensed state physics
- Publisher
- Elsevier, Kidlington
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Author keyword
- 81.05.Hd 81.05.Zx Ge condensation technique Germanium on insulator SOI-GeOI hybrid substrates
- Keyword (fr)
- Circuit intégré Condensation Couche ultramince Germanium Microprocesseur Technologie MOS complémentaire Technologie avancée Technologie germanium sur isolant Technologie planaire Technologie silicium germanium sur isolant Technologie silicium sur isolant Transistor MOSFET 8530T
- Keyword (en)
- Integrated circuit Condensation Ultrathin films Germanium Microprocessor Complementary MOS technology Advanced technology Germanium on insulator technology Planar technology Silicon germanium on insulator technology Silicon on insulator technology MOSFET
- Keyword (es)
- Circuito integrado Condensación Germanio Microprocesador Tecnología MOS complementario Tecnología avanzada Tecnología germanio sobre aislante Tecnología planar Tecnología silicio germanio sobre aislante Tecnología silicio sobre aislante
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F04 Transistors
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06B Integrated circuits by function (including memories and processors)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22236820
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mssp.2008.10.005 
https://dx.doi.org/10.1016/j.mssp.2008.10.005
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