Effect of coating thickness on the deformation behaviour of diamond-like carbon-silicon system
- Author
- HAQ, Ayesha J1 ; MUNROE, P. R1 ; HOFFMAN, M1 ; MARTIN, P. J2 ; BENDAVID, A2
[1] School of Materials Sci. & Eng., University of New South Wales, Sydney, NSW 2052, Australia
[2] CSIRO Materials Science and Engineering, PO Box 218, Lindfield, NSW 2070, Australia - Source
Thin solid films. 2010, Vol 518, Num 8, pp 2021-2028, 8 p ; ref : 37 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- Deformation Diamond-like carbon Focused ion beam microscopy Nanoindentation Silicon Transmission electron microscopy
- Keyword (fr)
- Carbone adamantin Déformation plastique Effet dimensionnel Empreinte dureté Essai dureté Faisceau ion Fissuration Germination dislocation Glissement Indentation Interface Microscopie électronique transmission Microstructure Nanodureté Nanoindentation Propriété mécanique Revêtement épais Silicium Transformation phase 6855J 6855N 6860B 8105U Si Substrat silicium
- Keyword (en)
- Diamond-like carbon Plastic deformation Size effect Hardness indentation Hardness testing Ion beams Cracking Dislocation nucleation Slip Indentation Interfaces Transmission electron microscopy Microstructure Nanohardness Nanoindentation Mechanical properties Thick coatings Silicon Phase transformations
- Keyword (es)
- Indentación dureza Nanodureza Nanoindentacion Revestimiento espeso
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55N Composition and phase identification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05T Fullerenes and related materials; diamonds, graphite
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22472477
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2009.08.041 
https://dx.doi.org/10.1016/j.tsf.2009.08.041
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