A new contactless electrochemical etch-stop based on a gold/silicon/TMAH galvanic cell
- Author
- ASHRUF, C. M. A1 ; FRENCH, P. J1 ; BRESSERS, P. M. M. C2 ; SARRO, P. M3 ; KELLY, J. J2
[1] Delft University of Technology, DIMES. Department of Electrical Engineering, Laboratory for Electronic Instrumentation, Mekelweg 4, 2628 CD Delft, Netherlands
[2] Utrecht University, Debye Institute, PO Box 80000, 3508 TA Utrecht, Netherlands
[3] Delft University of Technology, DIMES, Department of Electrical Engineering, Laboratory of Electronic Materials Devices and Components, Feldmannweg 17., 2628 CT Delft, Netherlands - Conference title
- TRANSDUCERS '97: International Conference on Solid-State Sensors and Actuators
- Conference name
- TRANSDUCERS '97: International Conference on Solid-State Sensors and Actuators (9 ; Chicago, IL 1997-06-16)
- Author (monograph)
- MIDDELHOEK, S (Editor); CAMMANN, K (Editor)
- Source
Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 284-291 ; ref : 17 ref
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Capteur Etude expérimentale Fabrication Fin gravure Gravure électrochimique Membrane Passivation Silicium
- Keyword (en)
- Sensors Experimental study Fabrication Etch stop Electrochemical etching Membranes Passivation Silicon
- Keyword (es)
- Para grabado Grabado electroquímico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D05 Electrical engineering. Electrical power engineering / 001D05I Electrical power engineering / 001D05I03 Direct energy conversion and energy accumulation / 001D05I03E Electrochemical conversion: primary and secondary batteries, fuel cells
- Discipline
- Electrical engineering. Electroenergetics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2253706
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0924-4247(97)01711-1 
https://dx.doi.org/10.1016/S0924-4247(97)01711-1
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