Surface-micromachined electrostatic microrelay
- Author
- SCHIELE, I1 ; HUBER, J1 ; HILLERICH, B1 ; KOZLOWSKI, F1
[1] Fraunhofer-Institute for Solid State Technology, Hansastrasse 27d, 80686, Munich, Germany - Conference title
- TRANSDUCERS '97: International Conference on Solid-State Sensors and Actuators
- Conference name
- TRANSDUCERS '97: International Conference on Solid-State Sensors and Actuators (9 ; Chicago, IL 1997-06-16)
- Author (monograph)
- MIDDELHOEK, S (Editor); CAMMANN, K (Editor)
- Source
Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 345-354 ; ref : 13 ref
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Commutateur Conception Electrostatique Etude expérimentale Fabrication Microusinage Relais miniature Relais électronique
- Keyword (en)
- Switches Design Electrostatics Experimental study Fabrication Micromachining Microrelay Electronic relay
- Keyword (es)
- Relé miniatura Relé electrónico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G50 Electrical and electronic components, instruments and techniques
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03D Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2254311
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0924-4247(97)01703-2 
https://dx.doi.org/10.1016/S0924-4247(97)01703-2
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