Monolithic pyroelectric infrared image sensor using PVDF thin film
- Author
- FUJITSUKA, N1 ; SAKATA, J1 ; MIYACHI, Y1 ; MIZUNO, K1 ; OHTSUKA, K1 ; TAGA, Y1 ; TABATA, O2
[1] Toyota Central R&D Laboratories, Nagakute, Aichi 480-11, Japan
[2] Department of Mechanical Engineering, Ritsumeikan University, Kusatsu, Shiga 525-77, Japan - Conference title
- TRANSDUCERS '97: International Conference on Solid-State Sensors and Actuators
- Conference name
- TRANSDUCERS '97: International Conference on Solid-State Sensors and Actuators (9 ; Chicago, IL 1997-06-16)
- Author (monograph)
- MIDDELHOEK, S (Editor); CAMMANN, K (Editor)
- Source
Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 237-243 ; ref : 8 ref
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Capteur image Couche mince Dispositif pyroélectrique Electrospray Etude expérimentale Microusinage Rayonnement IR
- Keyword (en)
- Image sensors Thin films Pyroelectric devices Electrospray Experimental study Micromachining Infrared radiation
- Keyword (es)
- Electrospray
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G57 Infrared, submillimeter wave, microwave and radiowave instruments, equipment and techniques
- Pacs
- 0757 Infrared, submillimeter wave, microwave and radiowave instruments, equipment and techniques
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2254474
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0924-4247(98)00050-8 
https://dx.doi.org/10.1016/S0924-4247(98)00050-8
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