The creep behaviour of the microfabricated silicon diaphragms at 900 °C
- Author
- JUAN REN1 ; KINNELL, Peter2 ; GEEAR, Martin2 ; WARD, Mike1 ; CRADDOCK, Russell2
[1] University of Birmingham, Birmingham, B15 2TT, United Kingdom
[2] GE Sensing & Inspection Technologies, Leicestershire, LE6 0FH, United Kingdom - Conference title
- The 35th International Conference on Micro- and Nano-Engineering (MNE), 28 September-1 October, 2009, Ghent, Belgium
- Conference name
- International Conference on Micro- and Nano-Engineering (MNE) (MNE) (35 ; Ghent 2009-09-28)
- Author (monograph)
- RONSE, Kurt (Editor); VAN THOURHOUT, Dries (Editor); DE GENDT, Stefan (Editor); LAGAE, Liesbet (Editor); VANDENBERGHE, Geert (Editor); WITVROUW, Ann (Editor)
- Source
Microelectronic engineering. 2010, Vol 87, Num 5-8, pp 1213-1216, 4 p ; ref : 7 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Creep MEMS Microfabrication Silicon diaphragms
- Keyword (fr)
- Diaphragme Dispositif microélectromécanique Dépendance du temps Fabrication microélectronique Fluage Haute température Micromachine Microusinage Pression atmosphérique Recuit Silicium 8540H
- Keyword (en)
- Diaphragm Microelectromechanical device Time dependence Microelectronic fabrication Creep High temperature Micromachine Micromachining Atmospheric pressure Annealing Silicon
- Keyword (es)
- Diafragma Dispositivo microelectromecánico Dependencia del tiempo Fabricación microeléctrica Fluencia Alta temperatura Micromáquina Micromaquinado Presión atmosférica Recocido Silicio
- Keyword (de)
- Kriechen Hochtemperatur Gluehen Silicium
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60B Mechanical and acoustical properties of condensed matter / 001B60B20 Mechanical properties of solids / 001B60B20H Creep
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11C Production techniques / 001D11C02 Heat treatment / 001D11C02A Annealing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11G Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology / 001D11G04 Creep
- Discipline
- Electronics Metals. Metallurgy Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22628785
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mee.2009.12.001 
https://dx.doi.org/10.1016/j.mee.2009.12.001
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