Effect of nonionic surfactant addition on Pyrex glass ablation using water-assisted CO2 laser processing
- Author
- CHUNG, C. K1 ; LIAO, M. W1 ; LIN, S. L1
[1] Department of Mechanical Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 70101, Taiwan, Province of China - Source
Applied physics. A, Materials science & processing (Print). 2010, Vol 99, Num 1, pp 285-290, 6 p ; ref : 20 ref
- ISSN
- 0947-8396
- Scientific domain
- Electronics; Optics; Condensed state physics
- Publisher
- Springer, Heidelberg
- Publication country
- Germany
- Document type
- Article
- Language
- English
- Keyword (fr)
- Agent surface Bétaïne Bétaïnes Contrainte thermique Densité énergie Dioxyde de carbone Défaut surface Gravure Méthode ablation laser Pastille électronique Puce électronique Traitement par laser Traitement thermique Verre pyrex Viscosité 8165C
- Keyword (en)
- Surfactants Betaine Betaines Thermal stresses Energy density Carbon dioxide Surface defect Etching Laser ablation technique Wafers Chip Laser assisted processing Heat treatments Pyrex Viscosity
- Keyword (es)
- Betainas Carbono dióxido Defecto superficie Pulga electrónica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A65 Surface treatments
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22637018
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s00339-009-5522-6 
https://dx.doi.org/10.1007/s00339-009-5522-6
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