Pascal and Francis Bibliographic Databases

Help

Export

Selection :

Permanent link
http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=22637018

Effect of nonionic surfactant addition on Pyrex glass ablation using water-assisted CO2 laser processing

Author
CHUNG, C. K1 ; LIAO, M. W1 ; LIN, S. L1
[1] Department of Mechanical Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 70101, Taiwan, Province of China
Source

Applied physics. A, Materials science & processing (Print). 2010, Vol 99, Num 1, pp 285-290, 6 p ; ref : 20 ref

ISSN
0947-8396
Scientific domain
Electronics; Optics; Condensed state physics
Publisher
Springer, Heidelberg
Publication country
Germany
Document type
Article
Language
English
Keyword (fr)
Agent surface Bétaïne Bétaïnes Contrainte thermique Densité énergie Dioxyde de carbone Défaut surface Gravure Méthode ablation laser Pastille électronique Puce électronique Traitement par laser Traitement thermique Verre pyrex Viscosité 8165C
Keyword (en)
Surfactants Betaine Betaines Thermal stresses Energy density Carbon dioxide Surface defect Etching Laser ablation technique Wafers Chip Laser assisted processing Heat treatments Pyrex Viscosity
Keyword (es)
Betainas Carbono dióxido Defecto superficie Pulga electrónica
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A65 Surface treatments

Discipline
Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
22637018

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

Access to the document

Searching the Web