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Surface treatments toward obtaining clean GaN(0 0 01 ) from commercial hydride vapor phase epitaxy and metal-organic chemical vapor deposition substrates in ultrahigh vacuum

Author
HATTORI, Azusa N1 ; ENDO, Katsuyoshi1 ; HATTORI, Ken2 ; DAIMON, Hiroshi2
[1] Research Centerfor Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, Yamada-oka 2-1, Suita, Osaka 565-0871, Japan
[2] Graduate School of Materials Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan
Source

Applied surface science. 2010, Vol 256, Num 14, pp 4745-4756, 12 p ; ref : 95 ref

ISSN
0169-4332
Scientific domain
General chemistry, physical chemistry; Crystallography; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Article
Language
English
Author keyword
68.37.Ef 68.43.Vx 68.47.Fg 68.55.ag GaN Low-energy electron diffraction Reflection high-energy electron diffraction Scanning tunneling microscopy Surface preparation Surface structure
Keyword (fr)
Composé minéral Croissance film Dépôt chimique phase vapeur Epitaxie phase vapeur LEED Microscopie tunnel balayage Nitrure de gallium Préparation surface RHEED Semiconducteur Structure surface Traitement surface Ultravide Ga N GaN
Keyword (en)
Inorganic compounds Film growth CVD VPE LEED Scanning tunneling microscopy Gallium nitride Surface preparation RHEED Semiconductor materials Surface structure Surface treatments Ultrahigh vacuum
Keyword (es)
Galio nitruro Preparación superficie
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties

Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology

Discipline
Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
22685176

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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