Nonlithographic Patterning and Metal-Assisted Chemical Etching for Manufacturing of Tunable Light-Emitting Silicon Nanowire Arrays
- Author
- CHERN, Winston1 3 ; HSU, Keng1 4 ; IK SU CHUN1 2 ; DE AZEREDO, Bruno P1 4 ; AHMED, Numair1 4 ; KIM, Kyou-Hyun3 ; ZUO, Jian-Min3 ; FANG, Nick1 4 ; FERREIRA, Placid1 4 ; XIULING LI1 2 3
[1] Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems, University of Illinois, Urbana, Illinois 61822, United States
[2] Department of Electrical and Computer Engineering, University of Illinois, Urbana, Illinois 61822, United States
[3] Department of Materials Science and Engineering, University of Illinois, Urbana, Illinois 61822, United States
[4] Department of Mechanical Science and Engineering, University of Illinois, Urbana, Illinois 61822, United States - Source
Nano letters (Print). 2010, Vol 10, Num 5, pp 1582-1588, 7 p ; ref : 34 ref
- Publisher
- American Chemical Society, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Argent Attaque chimique Dispositif photovoltaïque Emission optique Formation motif Gravure Matériau thermoélectrique Nanofil Nanomatériau Plasmon surface Procédé fabrication Propriété optique Rayonnement IR proche Réseau(arrangement) Semiconducteur Silicium 8107B 8107V 8116R 8535 Si
- Keyword (en)
- Silver Chemical etching Photovoltaic cell Light emission Patterning Etching Thermoelectric materials Nanowires Nanostructured materials Surface plasmons Manufacturing processes Optical properties Near infrared radiation Arrays Semiconductor materials Silicon
- Keyword (es)
- Ataque químico Dispositivo fotovoltaico Emisión óptica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A07 Nanoscale materials and structures: fabrication and characterization / 001B80A07B Nanocrystalline materials
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A07 Nanoscale materials and structures: fabrication and characterization / 001B80A07V Quantum wires
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A16 Methods of nanofabrication / 001B80A16R Nanoscale pattern formation
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F18 Molecular electronics, nanoelectronics
- Discipline
- Electronics Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22769098
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1021/nl903841a 
https://dx.doi.org/10.1021/nl903841a
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