Market oriented development and production of microdevices
- Author
- EHRFELD, W; HESSEL, V; KÄMPER, K.-P; LACHER, M; PICARD, A; SCHMIDT, M; SCHULZ, C
- Conference title
- MIEL '97 : 21st international conference on microelectronics (Nis, 14-17 September 1997)
- Conference name
- International conference on microelectronic (21 ; Nis 1997-09-14)
- Author (monograph)
- IEEE, Electron Devices Society, New York NY, United States (Organiser of meeting)
- Source
MIEL '97 : 21st international conference on microelectronics (Nis, 14-17 September 1997). 1997 ; 2Vol, pp 71-79 ; ref : 28 ref
- ISBN
- 0-7803-3664-X
- Scientific domain
- Electronics
- Publisher
- IEEE, New York NY
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Dispositif électromécanique Fabrication microélectronique
- Keyword (en)
- Electromechanical device Microelectronic fabrication
- Keyword (es)
- Dispositivo electromecánico Fabricación microeléctrica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2279419
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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