Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers
- Author
- JONNARD, Philippe1 2 ; MAURY, Hélène1 2 ; LE GUEN, Karine1 2 ; ANDRE, Jean-Michel1 2 ; MAHNE, Nicola3 ; GIGLIA, Angelo3 ; NANNARONE, Stefano3 4 ; BRIDOU, Françoise5
[1] Laboratoire de Chimie Physique - Matière et Rayonnement, UPMC Univ Paris 06, 11 rue Pierre et Marie Curie, 75231 Paris, France
[2] CNRS-UMR 7614, 11 rue Pierre et Marie Curie, 75231 Paris, France
[3] Laboratorio Nazionale TASC, INFM-CNR, s.s.14, km 163.5 in Area Science Park, 34012 Trieste, Italy
[4] Dipartimento di Ingegneria dei Materiali e dellAmbiente, Universita di Modena e Reggio Emilia, Via Vignolese 905, 41100 Modena, Italy
[5] Laboratoire Charles Fabry de l'lnstitut d'Optique, CNRS, Univ Paris-Sud, Campus Polytechnique, RD128, 91127 Palaiseau, France - Source
Surface science. 2010, Vol 604, Num 11-12, pp 1015-1021, 7 p ; ref : 35 ref
- Publisher
- Elsevier, Kidlington
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Author keyword
- Annealing B4C Diffusion barrier Multilayer Sc Si X-ray reflectivity X-ray scattering
- Keyword (fr)
- Barrière diffusion Diffusion RX Epaisseur Facteur réflexion Longueur corrélation Multicouche Recuit Rugosité Silicium Spectre RX Spectre réflexion Stabilité thermique Si
- Keyword (en)
- Diffusion barriers X-ray scattering Thickness Reflectivity Correlation length Multilayers Annealing Roughness Silicon X-ray spectra Reflection spectrum Thermal stability
- Keyword (es)
- Espectro reflexión
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22796357
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.susc.2010.03.012 
https://dx.doi.org/10.1016/j.susc.2010.03.012
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