Development of micro-diamond tools through electroless composite plating and investigation into micro-machining characteristics
- Author
- PARK, Heung-Kil1 ; ONIKURA, Hiromichi2 ; OHNISHI, Osamu2 ; SHARIFUDDIN, Ahmad3
[1] Graduate School of Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
[2] Faculty of Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
[3] Tokyo Electron Kyushu Limited, Fukuhara 1-1, Koshi-shi, Kumamoto 861-1116, Japan - Source
Precision engineering. 2010, Vol 34, Num 3, pp 376-386, 11 p ; ref : 12 ref
- CODEN
- PREGDL
- ISSN
- 0141-6359
- Scientific domain
- Mechanical engineering; Metallurgy, welding
- Publisher
- Elsevier, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Electroless plating Micro-channel device Micro-diamond tool Micro-grooving Micro-machining Silicon
- Keyword (fr)
- Agitation mécanique Diamant Dépôt par oxydoréduction Dépôt électrolytique Fabrication outil Matériau composite Microusinage Monocristal Mécanique précision Outil diamant Placage Silicium Microfluidique
- Keyword (en)
- Stirring Diamonds Electroless deposition Electrodeposition Tool manufacturing Composite materials Micromachining Monocrystals Precision engineering Diamond tool Plating Silicon Microfluidics
- Keyword (es)
- Fabricación herramienta Mecánica precisión Diamante Microfluídico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G85 Applied fluid mechanics / 001B40G85D Fluidics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling Physics : fluid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22805809
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.precisioneng.2009.09.001 
https://dx.doi.org/10.1016/j.precisioneng.2009.09.001
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