Analysis and design of an all metal in line series ohmic RF MEMS switch for microwave applications
- Author
- SPASOS, M1 2 ; CHARALAMPIDIS, N1 ; TSIAKMAKIS, K1 ; NILAVALAN, R2
[1] Department of Electronics, Alexander Technological Educational Institute Sindos, Thessaloniki, Greece
[2] Department of Electronic and Computer Engineering Brunel University Uxbridge, London, United Kingdom - Conference title
- DTIP 2010 (design, test, integration and packaging of MEMS/MOEMS)
- Conference name
- Symposium on design, test, integration and packaging of MEMS/MOEMS (Seville 2010-05-05)
- Author (monograph)
- Courtois, Bernard (Editor); Karam, Jean Michel (Editor); Maeda, Ryutaro (Editor); Nouet, Pascal (Editor); Schneider, Peter (Editor); Yang, Hsiharng (Editor)
- Source
DTIP 2010 (design, test, integration and packaging of MEMS/MOEMS). 2010 ; 1Vol, pp 27-32, 6 p ; ref : 15 ref
- ISBN
- 978-2-35500-011-9
- Scientific domain
- Optics
- Publisher
- EDA publishing, Grenoble
- Publication country
- France
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Commutateur Commutation Consommation électricité Contrôlabilité Dispositif microélectromécanique Fiabilité Hyperfréquence Liaison métallique Ligne contact Poutre cantilever Robustesse 0710C 8585
- Keyword (en)
- Selector switch Switching Electric power consumption Controllability Microelectromechanical device Reliability Microwave Metallic bond Contact line Cantilever beam Robustness
- Keyword (es)
- Conmutador Conmutación Consumo electricidad Controlabilidad Dispositivo microelectromecánico Fiabilidad Hiperfrecuencia Enlace metálico Línea contacto Viga cantilever Robustez
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22814095
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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