Pascal and Francis Bibliographic Databases

Help

Export

Selection :

Permanent link
http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=2287151

Monitoring and reduction of alkali metal contamination in dielectric oxides

Author
MAUTZ, K. E1
[1] Motorola, Inc., Semiconductor Products Sector, 505 Barton Springs Rd., Suite 1050, Austin, Texas 78704, United States
Conference title
Diagnostic techniques for semiconductor materials and devices (Montreal PQ, 6-8 May 1997)
Conference name
Electrochemical Society symposium on diagnostic techniques for semiconductor materials and devices (Montreal PQ 1997-05-06)
Author (monograph)
Rai-Choudhury, P (Editor); Benton, J.L (Editor); Schroder, D.K (Editor); Shaffner, T.J (Editor)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting)
Source

SPIE proceedings series. 1997, pp 68-79 ; ref : 10 ref

ISBN
0-8194-2765-9
Scientific domain
Electronics; Optics; Physics; Telecommunications
Publisher
Electrochemical Society, Pennington NJ / SPIE, Bellingham WA
Publication country
International
Document type
Conference Paper
Language
English
Keyword (fr)
Contamination Diélectrique Détection défaut Monitorage Métal alcalin Oxyde Spectrométrie SIMS
Keyword (en)
Contamination Dielectric materials Defect detection Monitoring Alkali metal Oxides Secondary ion mass spectrometry
Keyword (es)
Contaminación Dieléctrico Detección imperfección Monitoreo Metal alcalino Óxido Espectrometría SIMS
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03B Testing, measurement, noise and reliability

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
2287151

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

Searching the Web