Status review of the science and technology of ultrananocrystalline diamond (UNCD™) films and application to multifunctional devices
- Autor
- AUCIELLO, Orlando1 ; SUMANT, Anirudha V2
[1] Materials Science Division and Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439, United States
[2] Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439, United States - Nombre de la conferencia
- European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes and Nitrides (20 ; 2009)
- Fuente
Diamond and related materials. 2010, Vol 19, Num 7-9, pp 699-718, 20 p ; ref : 94 ref
- ISSN
- 0925-9635
- Campo Científico
- Crystallography
- Editor
- Elsevier, Amsterdam
- País de la publicación
- Netherlands
- Tipo de documento
- Conference Paper
- Idioma
- English
- Palabra clave de autor
- Biomedical devices Films MEMS NEMS Ultrananocrystalline diamond
- Palabra clave (fr)
- Article synthèse Biodétecteur Chimie plasma Conductivité électrique Couche mince métallique Couche mince Diamant synthétique Dispositif microélectromécanique Dispositif nanoélectromécanique Décharge hyperfréquence Défaut cristallin Dépôt chimique phase vapeur filament chaud Dépôt chimique phase vapeur Dépôt plasma Echelle nanométrique Emission champ Grosseur grain Joint grain Joint étanchéité Matériaux dissemblables Mécanisme croissance Méthane Nanostructure Revêtement Résonateur micromécanique 5277D 8105U 8107 8115J Diamant ultrananocristallin
- Palabra clave (in)
- Reviews Biosensors Plasma chemistry Electrical conductivity Metallic thin films Thin films Synthetic diamond Microelectromechanical device Nanoelectromechanical device Microwave discharge Crystal defects Hot filament chemical vapor deposition CVD Plasma deposition Nanometer scale Field emission Grain size Grain boundaries Seals Dissimilar materials Growth mechanism Methane Nanostructures Coatings Micromechanical resonators Ultrananocrystalline diamond
- Palabra clave (es)
- Diamante sintético Dispositivo microelectromecánico Dispositivo nanoelectromecánico Descarga hiperfrecuencia Depósito químico fase vapor filamento caliente Materiales desemejantes Mecanismo crecimiento
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B77 Plasma applications / 001B50B77D Plasma-based ion implantation and deposition
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05T Fullerenes and related materials; diamonds, graphite
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A07 Nanoscale materials and structures: fabrication and characterization / 001B80A07Z Other topics in nanoscale materials and structures
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15J Ion and electron beam-assisted deposition; ion plating
- Disciplina
- Physics and materials science Physics of gases, plasmas and electric discharges
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 22902321
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.diamond.2010.03.015 
https://dx.doi.org/10.1016/j.diamond.2010.03.015
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