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Morphological and structural characterization of WO3 and Cr-WO3 thin films synthesized by sol-gel process

EPIFANI, Mauro1 ; ARBIOL, Jordi2 3 ; DIAZ, Raul4 ; ANDREU, Teresa4 5 ; SICILIANO, Pietro1 ; MORANTE, Joan R4 5
[1] Istituto per la Microelettronica e i Microsistemi, IMM-CNR, Via Monteroni, 73100 Lecce, Italy
[2] MIND-IN2UB, Dept. Electronica, Universitat de Barcelona, Marti i Franques 1, 08028 Barcelona, CAT, Spain
[3] ICREA Research Professor at Institut de Ciencia de Materials de Barcelona, CSIC, 08193 Bellaterra, CAT, Spain
[4] M2E/XaRMAE/IN2UB, Departament d'Electrònica, Universitat de Barcelona, C. Martí i Franquès 1, 08028 Barcelona, CAT, Spain
[5] Institut de Recerca en Energia de Catalunya (IREC), C/ Josep Pla 2, B2, bx, 08019 Barcelona, Spain
Conference title
Proceedings of the EMRS 2009 Spring Meeting Symposium H: Synthesis, Processing and Characterization of Nanoscale Multi Functional Oxide Films II
Conference name
EMRS 2009 Spring Meeting. Symposium H Synthesis, Processing and Characterization of Nanoscale Multi Functional Oxide Films (Strasbourg 2009-06-08)
Author (monograph)
CRACIUN, Valentin (Editor)1 2 ; GUILLOUX-VIRY, Maryline (Editor)3 ; ALEXE, Marin (Editor)4 ; COSTA KRÄMER, José L (Editor)5 ; MOSNIER, Jean-Paul (Editor)6
European Materials Research Society (EMRS), Strasbourg, France (Organiser of meeting)
[1] National Institute for Laser, Plasma and Radiation Physics, Bucharest, Romania
[2] University of Florida, United States
[3] University of Rennes 1, France
[4] Max Planck Institute of Microstructure Physics, Halle, Germany
[5] Instituto de Microelectronica de Madrid, Spain
[6] Dublin City University, Ireland

Thin solid films. 2010, Vol 518, Num 16, pp 4512-4514, 3 p ; ref : 12 ref

Scientific domain
Crystallography; Metallurgy, welding; Condensed state physics
Elsevier, Amsterdam
Publication country
Document type
Conference Paper
Author keyword
Doping Sol-gel Spin-coating Tungsten trioxide
Keyword (fr)
Chrome Couche mince Diffraction RX Dopage Dépôt centrifugation Matériau poreux Microscopie électronique balayage transmission Microscopie électronique Microstructure Morphologie surface Oxyde de tungstène Procédé sol gel Rugosité Solution alcoolique Spectrométrie perte énergie électron Séparation phase Traitement thermique Tungstène 6855J 8115L W03 W WO3
Keyword (en)
Chromium Thin films XRD Doping Spin-on coating Porous materials Scanning transmission electron microscopy Electron microscopy Microstructure Surface morphology Tungsten oxide Sol-gel process Roughness Alcoholic solution EEL spectroscopy Phase separation Heat treatments Tungsten
Keyword (es)
Doping Wolframio óxido Solución alcohólica
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness

001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15L Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids)

Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
INIST identifier

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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