InP Overgrowth on SiO2 for Active Photonic Devices on Silicon
- Author
- JUNESAND, Carl1 ; ZHECHAO WANG1 ; WOSINSKI, Lech1 ; LOURDUDOSS, Sebastian1
[1] School of ICT, KTH, Electrum 229, 164 40 Kista, Sweden - Conference title
- Silicon photonics V (24-27 January 2010, San Francisco, California, United States)
- Conference name
- Silicon photonics (05 ; San Francisco CA 2010)
- Author (monograph)
- Kubby, Joel A (Editor); Reed, Graham T (Editor)
SPIE, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7606 ; 1Vol ; 760602.1-760602.10 ; ref : 25 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-8002-6 0-8194-8002-9
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Composé binaire Epitaxie phase vapeur Guide onde optique Indium Phosphure Lithographie faisceau électron Semiconducteur III-V Silicium Oxyde Silicium 0130C 4279G In P InP O Si Photonique SiO2 Substrat InP
- Keyword (en)
- Binary compounds VPE Optical waveguides Indium Phosphides Electron beam lithography III-V semiconductors Silicon Oxides Silicon Photonics
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B79 Optical elements, devices, and systems / 001B40B79G Optical waveguides and coupleurs
- Discipline
- Physics : optics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 22982743
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.841181 
https://dx.doi.org/10.1117/12.841181
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