Influence of substrate temperature and target composition on the properties of yttria-stabilized zirconia thin films grown by r.f. reactive magnetron sputtering
- Author
- BOULOUZ, M1 ; BOULOUZ, A1 ; GIANI, A1 ; BOYER, A1
[1] Centre d'Electronique et de Micro-optoélectronique de Montpellier, UMR 5507 CNRS-Université Montpellier Il, Sciences et Techniques du Languedoc, Place Eugène Bataillon, 34095 Montpellier, France - Source
Thin solid films. 1998, Vol 323, Num 1-2, pp 85-92 ; ref : 31 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Composition chimique Composé ternaire Couche mince Croissance cristalline en phase vapeur Dépendance température Etude expérimentale Hétérogénéité Indice extinction Indice réfraction Magnétron Pulvérisation haute fréquence Pulvérisation réactive Structure cristalline Substrat Yttrium oxyde Zircone stabilisée Zirconium oxyde O Y Zr Composé minéral Métal transition composé
- Keyword (en)
- Chemical composition Ternary compounds Thin films Crystal growth from vapors Temperature dependence Experimental study Inhomogeneity Extinction index Refractive index Magnetrons Radiofrequency sputtering Reactive sputtering Crystal structure Substrates Yttrium oxides Stabilized zirconia Zirconium oxides Inorganic compounds Transition element compounds
- Keyword (es)
- Indice extinción Pulverización alta frecuencia Zircona estabilizada
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films / 001B70H66N Insulators
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Pacs
- 7866N Insulators
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2305566
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0040-6090(97)01053-5 
https://dx.doi.org/10.1016/S0040-6090(97)01053-5
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