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Modeling, parameter estimation, and open-loop control of MEMS deformable mirrors

Author
VOGEL, Curtis R1 ; TYLER, Glenn A2 ; YANG LU3
[1] Department of Mathematical Sciences, Montana State University, Bozeman, MT 59717-2400, United States
[2] Optical Sciences Company, 1341 South Sunkist Street, Anaheim, CA 92806, United States
[3] Department of Mechanical Engineering, Boston University, Boston, MA 02215, United States
Conference title
MEMS adaptive optics IV (27-28 January 2010, San Francisco, California, United States)
Conference name
MEMS adaptive optics (04 ; San Francisco CA 2010)
Author (monograph)
Olivier, Scot S (Editor); Bifano, Thomas G (Editor); Kubby, Joel A (Editor)
SPIE, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7595 ; 1Vol ; 75950E.1-75950E.6 ; ref : 10 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-7991-4 0-8194-7991-8
Scientific domain
Electronics; Optics; Physics
Publisher
SPIE, Bellingham, Wash
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Actionneur Dispositif microélectromécanique Equation dérivée partielle Miroir déformable Optique adaptative 0130C 0707D 4279B 8585
Keyword (en)
Actuator Microelectromechanical device Partial differential equation Deformable mirror Adaptive optics
Keyword (es)
Accionador Dispositivo microelectromecánico Ecuación derivada parcial Espejo deformable Optica adaptativa
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B79 Optical elements, devices, and systems / 001B40B79B Lenses, prisms, and mirrors

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)

Discipline
Electronics Metrology Physics : optics Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
23094916

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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