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CMOS-Integrated RF MEMS Resonators

Author
ZALALUTDINOV, Maxim K1 ; CROSS, Joshua D2 ; BALDWIN, Jeffrey W3 ; ILIC, Bojan R2 ; WENZHE ZHOU2 ; HOUSTON, Brian H3 ; PARPIA, Jeevak M2
[1] Naval Research Laboratory, Washington, DC 20375, United States
[2] Cornell University, Ithaca, NY 14853, United States
[3] Naval Research Laboratory, Washington, DC 20375, United States
Source

Journal of microelectromechanical systems. 2010, Vol 19, Num 4, pp 807-815, 9 p ; ref : 33 ref

ISSN
1057-7157
Scientific domain
Electronics; Mechanics acoustics; Physics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Author keyword
CMOS microelectromechanical systems (MEMS) radio frequency (RF) resonator sensor
Keyword (fr)
Capteur mesure Circuit hyperfréquence Circuit intégré monolithique Circuit pont Couche oxyde Dispositif microélectromécanique Dispositif piézorésistif Dôme Empreinte Facteur qualité Frottement statique Radiofréquence Résonateur Silicium polycristallin Système sur puce Technologie MOS complémentaire Traitement signal Tête lecture
Keyword (en)
Measurement sensor Microwave circuit Monolithic integrated circuit Bridge circuit Oxide layer Microelectromechanical device Piezoresistive device Dome Imprinting Q factor Stiction Radiofrequency Resonator Polysilicon System on a chip Complementary MOS technology Signal processing Read head
Keyword (es)
Captador medida Circuito hiperfrecuencia Circuito integrado monolítico Circuito puente Capa óxido Dispositivo microelectromecánico Dispositivo piezoresistivo Domo Huella Factor calidad Frotamiento estatico Radiofrecuencia Resonador Silicio policristal Sistema sobre pastilla Tecnología MOS complementario Procesamiento señal Cabeza lectura
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02B Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits

Discipline
Electronics Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
23151230

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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