Analysis of thermoelastic damping in microresonators by considering the stretching effect
- Author
- ZAMANIAN, M1 ; KHADEM, S. E1
[1] Mechanical & Aerospace Engineering Department, Tarbiat Modares University, P.O. Box 14115-177, Tehran, Iran, Islamic Republic of - Source
International journal of mechanical sciences. 2010, Vol 52, Num 10, pp 1366-1375, 10 p ; ref : 18 ref
- CODEN
- IMSCAW
- ISSN
- 0020-7403
- Scientific domain
- Mechanics acoustics; Metallurgy, welding
- Publisher
- Elsevier, Oxford
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Author keyword
- Electrostatic actuation Microbeam Microresonator Perturbation method Thermoelastic damping
- Keyword (fr)
- Actionneur électrostatique Couche élastique Dispositif microélectromécanique Dispositif électrostatique Développement série Effet température Equation mouvement Facteur qualité Force électrostatique Fréquence résonance Modélisation Méthode perturbation Propriété thermomécanique Série Taylor Tension collage Thermoélasticité Transducteur capacitif Transfert chaleur Vibration libre
- Keyword (en)
- Electrostatic actuators Elastic layer Microelectromechanical device Electrostatic devices Series expansion Temperature effect Equation of motion Q factor Electrostatic force Resonance frequency Modeling Perturbation method Thermomechanical properties Taylor series Pull in voltage Thermoelasticity Capacitive transducer Heat transfer Free vibration
- Keyword (es)
- Capa elástica Dispositivo microelectromecánico Desarrollo serie Efecto temperatura Ecuación movimiento Factor calidad Fuerza electrostática Frecuencia resonancia Modelización Método perturbación Propriedad termomecánica Serie Taylor Tensión encolado Termoelasticidad Transductor capacitivo Transferencia térmica Vibración libre
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40F Solid mechanics / 001B40F30 Structural and continuum mechanics / 001B40F30C Static elasticity (thermoelasticity...)
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40F Solid mechanics / 001B40F30 Structural and continuum mechanics / 001B40F30M Vibration, mechanical wave, dynamic stability (aeroelasticity, vibration control...)
- Discipline
- Metrology Physics : solid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 23154552
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.ijmecsci.2010.07.001 
https://dx.doi.org/10.1016/j.ijmecsci.2010.07.001
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