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Lithography Cycle Time Improvements Using Short-Interval Scheduling

Author
NORMAN, David1 ; WATSON, Scott1 ; ANDERSON, Michael1 ; MARTENEY, Steve1 ; MEHR, Ben1
[1] Applied Materials Incorporated, 5245 Yeager Road, Salt Lake City, UT 84116, United States
Conference title
Optical microlithography XXIII (23-25 February 2010, San Jose, California, United States)
Conference name
Optical microlithography (23 ; San Jose CA 2010)
Author (monograph)
Dusa, Mircea V (Editor); Conley, Willard (Editor)
SPIE, United States (Organiser of meeting)
SEMATECH, Organization, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7640 ; 76403B.1-76403B.9 ; 2 ; ref : 3 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-8054-5 0-8194-8054-1
Scientific domain
Electronics; Optics; Physics
Publisher
SPIE, Bellingham, Wash
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Lithographie Ordonnancement Photolithographie Temps exécution 0130C 4282C Microlithographie
Keyword (en)
Lithography Schedules Photolithography Execution time
Keyword (es)
Tiempo ejecución
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides

Discipline
Electronics Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
23156056

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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