Realizing a 45nm System on Chip in the Age of Variability
- Author
- LE CAM, Laurent1 ; APPLEBY, Andy2 ; HURAT, Philippe3 ; CARPENTIER, Benoit4 ; CHEN, Kuang-Han3 ; VERGHESE, Nishath3
[1] NXP Semiconductors, Gerstweg 2, 6534 AE Nijmegen, Netherlands
[2] NXP Semiconductors, Millbrook Technology Campus, Southampton SO15 0DJ, United Kingdom
[3] Cadence Design Systems, Inc., 2655 Seely Ave, San Jose, CA 95134, United States
[4] Cadence Design Systems, 1080 Route des Dolines, 06560 Valbonne, France - Conference title
- Design for manufacturability through design-process integration IV (24-25 February 2010, San Jose, California, United States)
- Conference name
- Design for manufacturability through design-process integration (04 ; San Jose CA 2010)
- Author (monograph)
- Rieger, Michael L (Editor); Thiele, Joerg (Editor)
SPIE, United States (Organiser of meeting)
SEMATECH, Organization (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7641 ; 764106.1-764106.10 ; ref : 6 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-8055-2 0-8194-8055-X
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Circuit intégré Conception pour fabrication Evaluation performance Fabrication industrielle Fabrication microélectronique Lithographie Modem Méthode optimisation Optimisation Polissage mécanochimique Silicium Système sur puce 0130C 4282C 8540 8540H 8550G
- Keyword (en)
- Integrated circuit Design for manufacture Performance evaluation Manufacturing Microelectronic fabrication Lithography Modem Optimization method Optimization Chemical mechanical polishing Silicon System on a chip
- Keyword (es)
- Circuito integrado Evaluación prestación Fabricación microeléctrica Litografía Módem Método optimización Optimización Silicio Sistema sobre pastilla
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06B Integrated circuits by function (including memories and processors)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 23156066
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.848023 
https://dx.doi.org/10.1117/12.848023
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