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Monte Carlo Modelling of BSE Reflection in E-Beam Writers

Author
ALVES, H1 ; JOHNSEN, K.-P2 ; HAHMANN, P1 ; GNIESER, D2 ; FRASE, C. G2 ; BOSSE, H2
[1] Vistec Electron Beam GmbH, Goeschwitzer Strasse 25, 07745 Jena, Germany
[2] Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany
Conference title
Alternative lithographic technologies II (23-25 February 2010, San Jose, California, United States)
Conference name
Alternative lithographic technologies (02 ; San Jose CA 2010)
Author (monograph)
Herr, Daniel J. C (Editor)
SPIE, United States (Organiser of meeting)
SEMATECH, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7637 ; 76371T.1-76371T.8 ; ref : 8 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-8051-4 0-8194-8051-7
Scientific domain
Electronics; Optics; Physics
Publisher
SPIE, Bellingham, Wash
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Composition matériau Distribution radiale Ecriture faisceau électronique Faisceau électron Faisceau électronique Lithographie Matériau revêtu Modélisation Morphologie surface Méthode Monte Carlo Optimisation Pastille électronique Resist Rétrodiffuseur Silicium 0130C 4282C
Keyword (en)
Material composition Radial distribution Electron beam writing Electron beams Electron beam Lithography Coated material Modelling Surface morphology Monte Carlo methods Optimization Wafers Resists Backscatter Silicon
Keyword (es)
Composición material Distribución radial Escritura haz electrónico Haz electrónico Material revestido
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides

Discipline
Electronics Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
23156414

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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