Monte Carlo Modelling of BSE Reflection in E-Beam Writers
- Author
- ALVES, H1 ; JOHNSEN, K.-P2 ; HAHMANN, P1 ; GNIESER, D2 ; FRASE, C. G2 ; BOSSE, H2
[1] Vistec Electron Beam GmbH, Goeschwitzer Strasse 25, 07745 Jena, Germany
[2] Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany - Conference title
- Alternative lithographic technologies II (23-25 February 2010, San Jose, California, United States)
- Conference name
- Alternative lithographic technologies (02 ; San Jose CA 2010)
- Author (monograph)
- Herr, Daniel J. C (Editor)
SPIE, United States (Organiser of meeting)
SEMATECH, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7637 ; 76371T.1-76371T.8 ; ref : 8 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-8051-4 0-8194-8051-7
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Composition matériau Distribution radiale Ecriture faisceau électronique Faisceau électron Faisceau électronique Lithographie Matériau revêtu Modélisation Morphologie surface Méthode Monte Carlo Optimisation Pastille électronique Resist Rétrodiffuseur Silicium 0130C 4282C
- Keyword (en)
- Material composition Radial distribution Electron beam writing Electron beams Electron beam Lithography Coated material Modelling Surface morphology Monte Carlo methods Optimization Wafers Resists Backscatter Silicon
- Keyword (es)
- Composición material Distribución radial Escritura haz electrónico Haz electrónico Material revestido
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Discipline
- Electronics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 23156414
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.846517 
https://dx.doi.org/10.1117/12.846517
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