Micro-Raman spectroscopy stress measurement method for porous silicon film
- Author
- QIU LI1 ; WEI QIU1 ; HAOYUN TAN1 ; JIANGANG GUO1 ; YILAN KANG1
[1] Department of Mechanics, Tianjin University, Weijin Road 92, Tianjin 300072, China - Issue title
- MICRO AND NANO METROLOGY IN EXPERIMENTAL MECHANICS
- Author (monograph)
- KANG, Yilan (Editor)1 ; HUIMIN XIE (Editor)2
[1] Department of Mechanics, School of Mechanical Engineering, Tianjin University, Tianjin 300072, China
[2] Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China - Source
Optics and lasers in engineering. 2010, Vol 48, Num 11, pp 1119-1125, 7 p ; ref : 56 ref
- CODEN
- OLENDN
- ISSN
- 0143-8166
- Scientific domain
- Electronics; Optics; Telecommunications
- Publisher
- Elsevier, Kidlington
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Author keyword
- Elastic modulus Porous silicon Raman spectroscopy Residual stress
- Keyword (fr)
- Coefficient Poisson Contrainte résiduelle Diamant Domaine temps ps Matériau isotrope Matériau poreux Mesure contrainte Microspectrométrie Raman Méthode corrélation Méthode mesure Semiconducteur élémentaire Silicium Speckle Spectrométrie Raman 0760 4230M Métrologie optique Si Spectrométrie micro-Raman Substrat Silicium
- Keyword (en)
- Poisson ratio Residual stresses Diamonds ps range Isotropic material Porous materials Stress measurement Micro-Raman spectroscopy Correlation methods Measuring methods Elemental semiconductors Silicon Speckles Raman spectroscopy Optical metrology Micro-Raman spectroscopy
- Keyword (es)
- Material isótropo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B30 Imaging and optical processing / 001B40B30M Speckle and moire patterns
- Discipline
- Metrology Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 23213871
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.optlaseng.2009.12.020 
https://dx.doi.org/10.1016/j.optlaseng.2009.12.020
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