In-shot (Intra-field) overlay measurement considering overlay mark pattern dependency and illumination source dependency
- Author
- LEE, Dong-Han1 ; KIM, Jang-Sun1 ; LEE, Gil-Jin1 ; LEE, Sang-Ho1 ; CHO, Yong-Jin1 ; KANG, Young-Seog1 ; HAN, Woo-Sung1
[1] Samsung Electronics Co, San #16 Banwol-Dong, Hwasung-City, Gyeonggi-Do, Korea, Republic of - Conference title
- Lithography Asia 2009 (18-19 November 2009, Taipei, Taiwan)
- Conference name
- Lithography Asia (Taipei 2009)
- Author (monograph)
- Chen, Alek C (Editor)
SPIE, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520 ; 752019.1-752019.8 ; ref : 3 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-7909-9 0-8194-7909-8
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Boucle réaction Eclairement Evaluation performance Fabrication microélectronique Lithographie Multiplexage spatial Méthode mesure Production masse Scanneur 0130C 4282C
- Keyword (en)
- Feedback Illumination Performance evaluation Microelectronic fabrication Lithography Space division multiplexing Measuring methods Mass production Scanner
- Keyword (es)
- Fabricación microeléctrica Producción en masa Escáner
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F16 Imaging devices
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Discipline
- Electronics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 23220399
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.839675 
https://dx.doi.org/10.1117/12.839675
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