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The Synthesis and Imaging Study of a Series of Novel Photoactive Polymers with Diazoketo Groups in Their Side Chains

Author
LIU LU1 ; ZOU YINGQUAN1 ; YANG YUCHUN1 ; HUANG YONG1 ; LIU QISHENG1 ; NIU HUINAN1
[1] College of Chemistry, Beijing Normal University, Beijing 100875, China
Conference title
Lithography Asia 2009 (18-19 November 2009, Taipei, Taiwan)
Conference name
Lithography Asia (Taipei 2009)
Author (monograph)
Chen, Alek C (Editor)
SPIE, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520 ; 75201R.1-75201R.9 ; ref : 6 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-7909-9 0-8194-7909-8
Scientific domain
Electronics; Metrology and instrumentation; Optics; Physics
Publisher
SPIE, Bellingham, Wash
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Affichage cristaux liquides Affichage écran plat CARS Chaîne latérale Eau Fabrication microélectronique Formation image Gravure sèche Imagerie Lithographie Optique non linéaire Polymère Rayonnement UV extrême Résist amplification chimique Transistor couche mince 0130C 4282C
Keyword (en)
Liquid crystal displays Flat panel displays CARS Side chain Water Microelectronic fabrication Imaging Dry etching Imagery Lithography Nonlinear optics Polymers Extreme ultraviolet radiation Chemically amplified resist Thin film transistors
Keyword (es)
Cadena lateral Fabricación microeléctrica Grabado seco Imaginería Resistencia amplificación química
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F04 Transistors

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides

Discipline
Electronics Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
23220416

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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