Effect of composition and deposition temperature on the characteristics of Ga doped ZnO thin films
- Author
- KIM, Y. H1 2 ; JEONG, J1 ; LEE, K. S1 ; CHEONG, B1 ; SEONG, T.-Y2 ; KIM, W. M1
[1] Thin Film Materials Research Center, Korea Institute of Science and Technology, 39-1, Hawolgok-dong, Sungbuk-gu, Seoul 136-791, Korea, Republic of
[2] Department of Materials Science and Engineering, Korea University, Anam-Dong 5-1, Sungbuk-gu, Seoul 136-701, Korea, Republic of - Source
Applied surface science. 2010, Vol 257, Num 1, pp 109-115, 7 p ; ref : 30 ref
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- 73.61-r 78.20-e Deposition temperature Ga doped ZnO Transparent conducting oxide rf magnetron sputtering
- Keyword (fr)
- Addition gallium Conductivité électrique Couche mince Cristallinité Croissance film Effet concentration Effet température Facteur mérite Facteur transmission Magnétron Matériau dopé Oxyde de zinc Pulvérisation cathodique Structure basaltique ZnO:Ga Composé de métal de transition Composé minéral
- Keyword (en)
- Gallium additions Electrical conductivity Thin films Crystallinity Film growth Quantity ratio Temperature effects Figure of merit Transmittance Magnetrons Doped materials Zinc oxide Cathode sputtering Columnar structure Transition element compounds Inorganic compounds
- Keyword (es)
- Cristalinidad Factor mérito Factor transmisión Zinc óxido Estructura columnar
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Pacs
- 7361 Electrical properties of specific thin films and layer structures (multilayers, superlattices, quantum wells, wires, and dots)
- Pacs
- 7820C Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 23238660
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.apsusc.2010.06.045 
https://dx.doi.org/10.1016/j.apsusc.2010.06.045
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