Micro-ablation on silicon by femtosecond laser pulses focused with an axicon assisted with a lens
- Author
- INOUE, R1 ; TAKAKUSAKI, K1 ; TAKAGI, Y1 ; YAGI, T1
[1] Physics Department, Tokai University, 1717 Kita-kaname, Hiratsuka, Kanagawa 259-1292, Japan - Source
Applied surface science. 2010, Vol 257, Num 2, pp 476-480, 5 p ; ref : 23 ref
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- 42.62-b 42.65Re 78.40Fy 78.47+p 81.20Wk Axicon Clusters Debris Femtosecond laser Micromachining Silicon
- Keyword (fr)
- Femtoseconde Focalisation Microusinage Méthode ablation laser Rayonnement laser Silicium Si
- Keyword (en)
- Femtosecond Focusing Micromachining Laser ablation technique Laser radiation Silicon
- Keyword (es)
- Femtosegundo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B65 Nonlinear optics / 001B40B65R Ultrafast processes; optical pulse generation and pulse compression
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H40 Visible and ultraviolet spectra / 001B70H40F Semiconductors
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A20 Materials synthesis; materials processing
- Pacs
- 7840F Semiconductors
- Discipline
- Physics : optics Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 23242177
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.apsusc.2010.07.016 
https://dx.doi.org/10.1016/j.apsusc.2010.07.016
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