SAW Devices Manufactured on GaN/Si for Frequencies Beyond 5 GHz
- Author
- MÜLLER, Alexandru1 ; NECULOIU, Dan2 ; KONSTANTINIDIS, George3 ; DELIGEORGIS, George4 ; DINESCU, Adrian1 ; STAVRINIDIS, Antonis3 ; CISMARU, Alina1 ; DRAGOMAN, Mircea1 ; STEFANESCU, Alexandra1
[1] IMT-Bucharest, 07719 Bucharest, Romania
[2] Faculty of Electronics, Telecommunications, and Information Technology, Politehnica University of Bucharest, 060042 Bucharest, Romania
[3] FORTH IESL, 71110 Heraklion, Greece
[4] LAAS-CNRS, 31077 Toulouse, France - Source
IEEE electron device letters. 2010, Vol 31, Num 12, pp 1398-1400, 3 p ; ref : 10 ref
- CODEN
- EDLEDZ
- ISSN
- 0741-3106
- Scientific domain
- Electronics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- E-beam nanolithography interdigitated transducers (IDTs) surface acoustic wave (SAW)
- Keyword (fr)
- Composé binaire Dispositif onde acoustique surface Dispositif onde acoustique Domaine fréquence GHz Espacement Fabrication microélectronique Lithographie faisceau électron Métallisation Nitrure de gallium Onde acoustique Onde surface Paramètre s Pastille électronique Réponse fréquence Transducteur interdigital GaN Composé III-V Lithographie sans masque
- Keyword (en)
- Binary compound Surface acoustic wave devices Acoustic wave device GHz range Spacing Microelectronic fabrication Electron beam lithography Metallizing Gallium nitride Acoustic wave Surface wave s parameter Wafer Frequency response Interdigital transducer III-V compound Maskless lithography
- Keyword (es)
- Compuesto binario Dispositivo onda acústica Espaciamiento Fabricación microeléctrica Litografía haz electrón Metalización Galio nitruro Onda acústica Onda superficie Parámetro s Pastilla electrónica Respuesta frecuencia Transductor interdigital Compuesto III-V Litografía sin máscara
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F14 Acoustic wave devices, piezoelectric and piezoresistive devices
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 23669631
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/LED.2010.2078484 
https://dx.doi.org/10.1109/LED.2010.2078484
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