Microelectromechanical filters for signal processing
- Author
- LIN, L1 ; HOWE, R. T2 ; PISANO, A. P3
[1] Department of Mechanical Engineering and Applied Mechanics, University of Michigan, Ann Arbor, MI 48109-2125, United States
[2] Department of Electrical Engineering and Computer Science, University of California, Berkeley, CA 94720, United States
[3] Department of Mechanical Engineering, University of California, Berkeley, CA 94720, United States - Source
Journal of microelectromechanical systems. 1998, Vol 7, Num 3, pp 286-294 ; ref : 41 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Encapsulation Equipement audiofréquence Filtre mécanique Filtre électromécanique Miniaturisation Modélisation Processus fabrication Rapport signal bruit Schéma équivalent Système électromécanique Traitement signal Vide
- Keyword (en)
- Encapsulation Audio equipment Mechanical filter Electromechanical filter Miniaturization Modeling Production process Signal to noise ratio Equivalent circuit Electromechanical system Signal processing Vacuum
- Keyword (es)
- Encapsulación Equipo audiofrecuencia Filtro mecánico Filtro electromecánico Miniaturización Modelización Proceso fabricación Relación señal ruido Esquema equivalente Sistema electromecánico Procesamiento señal Vacío
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03D Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02A Electronic circuits / 001D03G02A3 Frequency filters
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2369245
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/84.709645 
https://dx.doi.org/10.1109/84.709645
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