The characterization of a miniature silicon micromachined capacitive accelerometer
- Author
- PUERS, R1 ; REYNTJENS, S1
[1] Katholieke Universiteit Leuven, Department ESAT-MICAS, Kardinaal Mercierlaan 94, 3001 Heverlee, Belgium - Conference title
- MME'97 Workshop on Micromachining, Micromechanics and Microsystems
- Conference name
- MME'97 Workshop on Micromachining, Micromechanics and Microsystems (8 ; Southampton 1997-08-31)
- Author (monograph)
- EVANS, A. G. R (Editor)1
[1] Department of Electronics and Computer Science, Southampton University, United Kingdom - Source
Journal of micromechanics and microengineering (Print). 1998, Vol 8, Num 2, pp 127-133 ; ref : 6 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Accéléromètre Capteur accélération Conception Etude expérimentale Microcapteur Processus fabrication Silicium Transducteur capacitif
- Keyword (en)
- Accelerometers Acceleration sensor Design Experimental study Microsensors Production process Silicon Capacitive transducer
- Keyword (es)
- Sensor acceleración Proceso fabricación Transductor capacitivo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00F Metrology, measurements and laboratory procedures / 001B00F30 Measurements common to several branches of physics and astronomy / 001B00F30G Velocity, acceleration and rotation
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2369446
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/8/2/021 
https://dx.doi.org/10.1088/0960-1317/8/2/021
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