Monodisperse aerosol particle deposition : Prospects for nanoelectronics
- Author
- PROST, W1 ; KRUIS, F. E2 ; OTTEN, F2 ; NIELSCH, K2 ; RELLINGHAUS, B3 ; AUER, U1 ; PELED, A2 4 ; WASSERMANN, E. F3 ; FISSAN, H2 ; TEGUDE, F. J1
[1] Halbleitertechnik/Halbleitertechnologie, Gerhard-Mercator-Universität, 47048 Duisburg, Germany
[2] Prozess- und Aerosolmesstechnik, Gerhard-Mercator-Universität, 47048 Duisburg, Germany
[3] Exp. Tieftemperaturphysik, Gerhard-Mercator-Universität, 47048 Duisburg, Germany
[4] Center for Technological Education, 58102 Holon, Israel - Conference title
- Micro- and Nano-Engineering MNE 97 International Conference on Micro- and Nanofabrication
- Conference name
- Micro- and Nano-Engineering MNE 97 International Conference on Micro- and Nanofabrication (Athens 1998-09-15)
- Author (monograph)
- HATZAKIS, M (Editor)1 ; GOGOLIDES, E (Editor)1
[1] NCSR Demokritos, Aghia Paraskevi, Greece - Source
Microelectronic engineering. 1998, Vol 41-42, pp 535-538 ; ref : 12 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Aérosol Composé binaire Dépôt Effet quantique Fabrication microélectronique Nanotechnologie Plomb Sulfure Précipitation électrostatique Structure 3 dimensions Nanoparticule Pb S PbS
- Keyword (en)
- Aerosols Binary compound Deposition Quantum effect Microelectronic fabrication Nanotechnology Lead Sulfides Electrostatic precipitation Three dimensional structure
- Keyword (es)
- Aerosol Compuesto binario Depósito Efecto cuántico Fabricación microeléctrica Nanotecnología Plomo Sulfuro Precipitación electrostática Estructura 3 dimensiones
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2378990
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0167-9317(98)00125-7 
https://dx.doi.org/10.1016/S0167-9317(98)00125-7
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