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The changes of short range ordering in amorphous silicon-carbon alloys by thermal annealing

Author
GRACIN, D1 ; RADIC, N1 ; IVANDA, M1 ; ANDREIC, Z1 ; PRACEK, B2
[1] Ruder Bošković Institute, POB 1016, Zagreb 10001, Croatia
[2] Institute for Electronics and Vacuum Technique, POB 59, Ljubljana 61000, Slovenia
Conference title
ICTF-10 International Conference on Thin Films
Conference name
ICTF-10 International Conference on Thin Films (10 ; Salamanca 1996-09-23)
Author (monograph)
COLLIGON, John S (Editor)1 ; DE SEGOVIA, José L (Editor)2 ; MARTINEZ-DUART, José M (Editor)3
Spanish Vacuum Society (ASEVA), Spain (Funder/Sponsor)
International Union for Vacuum Science, Technique and Applications ; Vacuum Science Division, International (Funder/Sponsor)
International Union for Vacuum Science, Technique and Applications ; Thin Film Division, International (Funder/Sponsor)
[1] University of Salford, Salford, United Kingdom
[2] Instituto de Física Aplicada, CSIC, Madrid, Spain
[3] Universidad AutÓnoma, Madrid, Spain
Source

Thin solid films. 1998, Vol 317, Num 1-2, pp 206-209 ; ref : 18 ref

CODEN
THSFAP
ISSN
0040-6090
Scientific domain
Crystallography; Electronics; Metallurgy, welding; Condensed state physics
Publisher
Elsevier Science, Lausanne
Publication country
Switzerland
Document type
Conference Paper
Language
English
Keyword (fr)
Couche mince Cristallisation Etude expérimentale Liaison chimique Matériau amorphe hydrogéné Modèle structure Ordre courte distance Ordre désordre Recuit thermique Silicium carbure Spectre IR Structure état amorphe C Si a-Si0,7C0,3:H a-Si0,9C0,1:H Composé minéral
Keyword (en)
Thin films Crystallization Experimental study Chemical bonds Amorphous hydrogenated material Structural models Short-range order Order disorder Thermal annealing Silicon carbides Infrared spectra Amorphous state structure Inorganic compounds
Keyword (es)
Orden desorden Recocido térmico Estructura estado amorfo
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness

Pacs
6855J Structure and morphology; thickness

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
2393140

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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