Thermal stability of GaN on (111) Si substrate

Author

ISHIKAWA, H¹ ; YAMAMOTO, K¹ ; EGAWA, T² ; SOGA, T³ ; JIMBO, T^{2 3} ; UMENO, M¹
[1] Department of Electrical and Computer Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466, Japan
[2] Research Center for Micro-Structure Devices, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466, Japan
[3] Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466, Japan

Conference title

Nitride semiconductors 1997

Conference name

ICNS'97 International Conference on Nitride Semiconductors (2 ; Tokushima 1997-10-27)

Author (monograph)

HIRAMATSU, K (Editor)¹ ; KISHINO, K (Editor)² ; NAKAMURA, S (Editor)³ ; AMANO, H (Editor)⁴
The Japan Society of Applied Physics, Japan (Funder/Sponsor)
[1] Mie University, Japan
[2] Sophia University, Japan
[3] Nichia Chemical Industries, Japan
[4] Meijo University, Japan

Source

Journal of crystal growth. 1998, Vol 189-90, pp 178-182 ; ref : 4 ref

CODEN

JCRGAE

ISSN

0022-0248

Scientific domain

Crystallography; Geology; Metallurgy, welding

Publisher

Elsevier, Amsterdam

Publication country

Netherlands

Document type

Conference Paper

Language

English

Keyword (fr)

Basse température Composé binaire Couche mince Couche tampon Etude expérimentale Gallium nitrure Gonflement Interface solide solide Méthode MOCVD Recuit thermique Semiconducteur III-V Stabilité thermique Substrat Ga N GaN Composé minéral

Keyword (en)

Low temperature Binary compounds Thin films Buffer layer Experimental study Gallium nitrides Swelling Solid-solid interfaces MOCVD Thermal annealing III-V semiconductors Thermal stability Substrates Inorganic compounds

Keyword (es)

Baja temperatura Capa tampón Recocido térmico

Classification

Pascal

001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60D Thermal stability; thermal effects

Pacs

6860D Thermal stability; thermal effects

Discipline

Physics of condensed state : structure, mechanical and thermal properties

Origin

Inist-CNRS

Database

PASCAL

INIST identifier

2396015

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS