A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation
- Author
- YANGMIN LI1 ; QINGSONG XU1
[1] Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Taipa, Macao - Source
IEEE transactions on automation science and engineering. 2011, Vol 8, Num 2, pp 265-279, 15 p ; ref : 38 ref
- ISSN
- 1545-5955
- Scientific domain
- Control theory, operational research
- Publisher
- Institute of Electrical and Electronics Engineers, Piscataway, NJ
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Finite-element analysis (FEA) flexure mechanisms mechanism design micro/nanopositioning motion control parallel manipulators piezoelectric hysteresis
- Keyword (fr)
- Cinématique Commande position Conception optimale Effet non linéaire Entrée sortie Etude expérimentale Hystérésis Micromanipulation Modélisation Mécanique précision Mécanisme flexible Mécanisme parallèle Méthode élément fini Nanotechnologie Optimisation PSO Piézoélectricité Positionnement Processus conception Préparation gamme fabrication Rétroaction Submicromètre Système 2 degrés liberté Table XY Transducteur piézoélectrique Actionneur piézoélectrique Echelle nanométrique
- Keyword (en)
- Kinematics Position control Optimal design Non linear effect Input output Experimental study Hysteresis Micromanipulation Modeling Precision engineering Compliant mechanism Parallel mechanism Finite element method Nanotechnology Particle swarm optimization Piezoelectricity Positioning Design process Process planning Feedback regulation Submicrometer System with two degrees of freedom XY stage Piezoelectric sensor Piezoelectric actuators Nanometer scale
- Keyword (es)
- Cinemática Regulación de la posición Concepción optimal Efecto no lineal Entrada salida Estudio experimental Histéresis Micromanipulación Modelización Mecánica precisión Mecanismo flexible Mecanismo paralelo Método elemento finito Nanotecnología Optimización PSO Piezoelectricidad Posicionamiento Proceso concepcion Preparación serie fabricación Retroacción Submicrómetro Sistema 2 grados libertad Tablado XY Transductor piezoelectrico Actuador piezoeléctrico Escala nanométrica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A16 Methods of nanofabrication
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12E Drives / 001D12E06 Linkage mechanisms, cams
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 24086422
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/TASE.2010.2077675 
https://dx.doi.org/10.1109/TASE.2010.2077675
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