Flash evaporation of TiNi shape memory thin film for microactuators
- Author
- MAKINO, E1 ; UENOYAMA, M1 ; SHIBATA, T1
[1] Electronics and Information Engineering, Graduate School of Engineering, Hokkaido University, Kita 13, Nishi 8, Kita-ku, Sapporo 060-8628, Japan - Source
Sensors and actuators. A, Physical. 1998, Vol 71, Num 3, pp 187-192 ; ref : 10 ref
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Couche mince Effet mémoire forme Etude expérimentale Evaporation flash Microactionneur Nickel Titane
- Keyword (en)
- Thin films Shape memory effects Experimental study Flashing Microactuators Nickel Titanium
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60D Equations of state, phase equilibria, and phase transitions / 001B60D70 Specific phase transitions / 001B60D70K Solid-solid transitions
- Discipline
- Metrology Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2414817
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0924-4247(98)00180-0 
https://dx.doi.org/10.1016/S0924-4247(98)00180-0
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