Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors
- Author
- GRAHMANN, Jan1 ; GRASSHOFF, Thomas1 ; CONRAD, Holger1 ; SANDNER, Thilo1 ; SCHENK, Harald1
[1] Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche Str. 2, 01109 Dresden, Germany - Conference title
- MOEMS and miniaturized systems X (24-26 January 2011, San Francisco, California, United States)
- Conference name
- MOEMS and miniaturized systems (10 ; San Francisco CA 2011)
- Author (monograph)
- Schenk, Harald (Editor); Wibool Piyawattanametha (Editor)
SPIE, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7930 ; 79300V.1-79300V.8 ; ref : 4 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-8467-3
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Contrainte mécanique Dispositif microoptoélectromécanique Miroir 0130C 0710C 8585
- Keyword (en)
- Mechanical stress Microoptoelectromechanical device Mirrors
- Keyword (es)
- Tensión mecánica Dispositivo microoptoelectromecánico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics Metrology Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 24356223
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.874979 
https://dx.doi.org/10.1117/12.874979
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