A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications
- Author
- KOTTAPALLI, A. G. P1 ; TAN, C. W1 2 ; OLFATNIA, M1 ; MIAOL, J. M1 ; BARBASTATHIS, G2 3 ; TRIANTAFYLLOU, M2 3
[1] School of Mechanical & Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798, Singapore
[2] Center for Environmental Sensing and Modeling (CENSAM) IRG, Singapore-MIT Alliance for Research and Technology (SMART), 3 Science Drive 2, 117543, Singapore
[3] Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, United States - Source
Journal of micromechanics and microengineering (Print). 2011, Vol 21, Num 8 ; 085006.1-085006.11 ; ref : 23 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Basse température Capteur mesure Capteur pression Capteur vitesse Couche mince Dispositif microélectromécanique Dispositif piézorésistif Débit Détecteur proximité Ecoulement air Environnement hostile Etude expérimentale Fiabilité Membrane Mesure débit écoulement Modélisation Monitorage Silicium Polymère cristal liquide
- Keyword (en)
- Low temperature Measurement sensor Pressure sensors Velocity sensor Thin films Microelectromechanical device Piezoresistive devices Flow rate Proximity detector Air flow Hostile environment Experimental study Reliability Membranes Flow measurement Modelling Monitoring Silicon Liquid crystal polymers
- Keyword (es)
- Baja temperatura Captador medida Sensor velocidad Dispositivo microelectromecánico Detector proximidad Medio ambiente hóstil Monitoreo Polímero cristal líquido
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40C Acoustics / 001B40C30 Underwater sound
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G80 Instrumentation for fluid dynamics
- Pascal
- 002 Biological and medical sciences / 002B Medical sciences / 002B24 Investigative techniques, diagnostic techniques (general aspects) / 002B24O Pathology. Cytology. Biochemistry. Spectrometry. Miscellaneous investigative techniques / 002B24O05 Respiratory system
- Discipline
- Metrology Physics : acoustics Physics : fluid mechanics Scanning and diagnostic techniques
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 24442000
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/21/8/085006 
https://dx.doi.org/10.1088/0960-1317/21/8/085006
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