Integrated Model-Based Retargeting and Optical Proximity Correction
- Author
- AGARWAL, Kanak B1 ; BANERJEE, Shayak2
[1] IBM Research, Austin, TX, United States
[2] IBM Research, East Fishkill, NY, United States - Conference title
- Design for manufacturability through design-process integration V (2-3 March 2011, San Jose, California, United States)
- Conference name
- Design for manufacturability through design-process integration. Conference (05 ; San Jose CA 2011-03-02)
- Author (monograph)
- Rieger, Michael L (Editor); Mason, Mark E (Editor)
SPIE, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7974 ; 79740F.1-79740F.10 ; ref : 15 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-8533-5
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham WA
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Adressage Conception Correction optique de proximité Extensibilité Haute résolution Liaison métallique Ligne contact Lithographie Modèle 2 dimensions Méthode itérative Optique intégrée Point chaud Système expert Temps exécution Temps retard 0130C 4282C Sub longueur onde
- Keyword (en)
- Addressing Design Optical proximity correction Scalability High-resolution methods Metallic bonds Contact line Lithography Two dimensional model Iterative methods Integrated optics Hot spots Expert systems Execution time Time delay Subwavelength
- Keyword (es)
- Direccionamiento Corrección de proximidad óptica Estensibilidad Línea contacto Modelo 2 dimensiones Tiempo ejecución
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Discipline
- Electronics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 24588153
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.879531 
https://dx.doi.org/10.1117/12.879531
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