Influence of test structure design on stress-induced-voiding using an experimentally validated Finite Element Modeling approach
- Author
- LOFRANO, M1 ; CROES, K1 ; DE WOLF, I1 2 ; WILSON, C. J1
[1] Imec, Kapeldreef 75, 3001 Leuven, Belgium
[2] K.U. Leuven, Dept. MTM, Kasteelpark Arenberg 44 - Bus 2450, 3001 Leuven, Belgium - Conference title
- Proceedings of the 22nd European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis (ESREF 2011)
- Conference name
- European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis (ESREF 2011) (ESREF 2011) (22 ; Bordeaux 2011-10-03)
- Author (monograph)
- LABAT, N (Editor)1 ; MARC, F (Editor)1
[1] IMS, University of Bordeaux, France - Source
Microelectronics and reliability. 2011, Vol 51, Num 9-11, pp 1578-1581, 4 p ; ref : 13 ref
- CODEN
- MCRLAS
- ISSN
- 0026-2714
- Scientific domain
- Electronics
- Publisher
- Elsevier, Kidlington
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Appareillage essai Défaillance Effet contrainte Modélisation Méthode numérique Méthode élément fini
- Keyword (en)
- Testing equipment Failures Stress effects Modeling Numerical method Finite element method
- Keyword (es)
- Aparato ensayo Fallo Modelización Método numérico Método elemento finito
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03B Testing, measurement, noise and reliability
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 24618517
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.microrel.2011.07.068 
https://dx.doi.org/10.1016/j.microrel.2011.07.068
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