Conformality and composition of films deposited at low pressures
- Author
- CALE, T. S1
[1] Center for Solid State Electronics, Arizona State University, Tempe, AZ 85T287-6206, United States - Source
Chemical engineering communications (Print). 1996, Vol 152-53, pp 261-273 ; ref : 27 ref
- CODEN
- CEGCAK
- ISSN
- 0098-6445
- Scientific domain
- Chemical engineering
- Publisher
- Taylor & Francis, Elmont, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Alliage binaire Basse pression Cinétique Composition chimique Composé binaire Croissance cristalline en phase vapeur Dépôt chimique phase vapeur Dépôt physique phase vapeur Etude théorique Film Modèle Phénomène transport Réaction chimique Silicium oxyde Technologie tranche Titane alliage Tungstène alliage Alliage TiW O Si SiO2 Ti W Composé minéral Métal transition alliage
- Keyword (en)
- Binary alloys Low pressure Kinetics Chemical composition Binary compounds Crystal growth from vapors CVD Physical vapor deposition Theoretical study Films Models Transport processes Chemical reactions Silicon oxides Trench technology Titanium alloys Tungsten alloys Inorganic compounds Transition element alloys
- Keyword (es)
- Modelo Tecnología trinchera
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A10 Methods of crystal growth; physics of crystal growth / 001B80A10A Theory and models of crystal growth; physics of crystal growth, crystal morphology and orientation
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy
- Pacs
- 8110A Theory and models of crystal growth; physics of crystal growth, crystal morphology and orientation
- Discipline
- Metals. Metallurgy Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2471983
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1080/00986449608936567 
https://dx.doi.org/10.1080/00986449608936567
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