Polymers in conventional and alternative lithography for the fabrication of nanostructures
- Author
- ACIKGOZ, Canet1 2 ; HEMPENIUS, Mark A1 ; HUSKENS, Jurriaan2 ; JULIUS VANCSO, G1
[1] Materials Science and Technology of Polymers, MESA' Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, Netherlands
[2] Molecular Nanofabrication Group, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, Netherlands - Source
European polymer journal. 2011, Vol 47, Num 11, pp 2033-2052, 20 p ; ref : 170 ref
- CODEN
- EUPJAG
- ISSN
- 0014-3057
- Scientific domain
- Polymers, paint and wood industries
- Publisher
- Elsevier, Kidlington
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Author keyword
- Alternative lithography Colloidal assembly Conventional lithography Nanoimprint lithography Patterning Polymer resists
- Keyword (fr)
- Electrorésist Etat actuel Lithographie faisceau électron Lithographie nanoimpression Nanolithographie Photolithographie Photorésist Polymère
- Keyword (en)
- Electroresist State of the art Electron beam lithography Nanoimprint lithography Nanolithography Photolithography Photoresist Polymer
- Keyword (es)
- Polímero electrosensible Estado actual Litografía haz electrón Litografía nanoimpresión Fotolitografía Fotorresistencia Polímero
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D10 Polymer industry, paints, wood / 001D10A Technology of polymers / 001D10A04 Machinery and processing / 001D10A04A Plastics / 001D10A04A8 Miscellaneous
- Discipline
- Polymer industry, paints, wood
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 24724355
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.eurpolymj.2011.07.025 
https://dx.doi.org/10.1016/j.eurpolymj.2011.07.025
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