Confirmation of AlGaAs crystal domain inversion using asymmetric wet etching and optical second-harmonic generation methods
- Author
- XU, C.-Q1 ; TAKEMASA, K1 ; NAKAMURA, K1 ; WADA, H1 ; TAKAMORI, T1 ; OKAYAMA, H1 ; KAMIJOH, T1
[1] Semiconductor Technology Laboratory, Oki Electric Industry Co., Ltd., 550-5 Higashiasakawa, Hachioji, Tokyo 193, Japan - Source
Japanese journal of applied physics. 1996, Vol 35, Num 11A ; L 1419-L 1421 ; 2 ; ref : 10 ref
- CODEN
- JJAPA5
- ISSN
- 0021-4922
- Scientific domain
- Crystallography; Optics; Condensed state physics; Physics; Plasma physics
- Publisher
- Japanese journal of applied physics, Tokyo
- Publication country
- Japan
- Document type
- Article
- Language
- English
- Keyword (fr)
- Aluminium Arséniure Attaque chimique Composé III-V Composé ternaire Etude expérimentale Fabrication Gallium Arséniure Générateur harmonique Harmonique 2 Optique intégrée Réseau diffraction Al As Ga AlGaAs Inversion domaine
- Keyword (en)
- Aluminium Arsenides Chemical etching III-V compound Ternary compound Experimental study Manufacturing Gallium Arsenides Harmonic generator Second harmonic Integrated optics Diffraction grating
- Keyword (es)
- Aluminio Arseniuro Ataque químico Compuesto III-V Compuesto ternario Estudio experimental Fabricación Galio Arseniuro Generador armónico Armónica 2 Optica integrada Rejilla difracción
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2502591
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1143/JJAP.35.L1419 
https://dx.doi.org/10.1143/JJAP.35.L1419
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