Laser Dark-Field Illumination System Modeling for Semiconductor Inspection Applications
- Author
- WEI ZHOU1 ; HART, Darcy1 ; ROY, Rajiv1
[1] Rudolph Technologies Inc, 4900 78th ST, Bloomington, MN, 55435, United States - Conference title
- Illumination optics II (7-8 September 2011, Marseille, France)
- Conference name
- Illumination optics. Conference (02 ; Marseille 2011-09-07)
- Author (monograph)
- Kidger, Tina E (Editor); David, Stuart R (Editor)
SPIE, United States (Organiser of meeting)
POPSud - Optitec, France (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 8170 ; 81700P.1-81700P.7
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-8796-4
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Contrôle qualité Diode laser Eclairement Evaluation performance Laser semiconducteur Semiconducteur 0130C 4255P
- Keyword (en)
- Quality control Laser diodes Illumination Performance evaluation Semiconductor lasers Semiconductor materials
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B55 Lasers / 001B40B55P Semiconductor lasers; laser diodes
- Discipline
- Physics : optics Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 25437783
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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