Improvements in (112̄2) semipolar GaN crystal quality by graded superlattices
- Autor
- XU, S. R1 ; ZHANG, J. C1 ; CAO, Y. R2 ; ZHOU, X. W1 ; XUE, J. S1 ; LIN, Z. Y1 ; MA, J. C1 ; BAO, F3 ; HAO, Y1
[1] Key Lab of Wide Band-Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi'an 710071, China
[2] School of Electronical & Machanical Engineering, Xidian University, Xi'an, 710071, China
[3] Suzhou Institute of Nano-Tech & Nano-Bionics, Chinese Academy of Sciences, Suzhou 215125, China - Fuente
Thin solid films. 2012, Vol 520, Num 6, pp 1909-1912, 4 p ; ref : 24 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Campo Científico
- Crystallography; Metallurgy, welding; Condensed state physics
- Editor
- Elsevier, Amsterdam
- País de la publicación
- Netherlands
- Tipo de documento
- Article
- Idioma
- English
- Palabra clave de autor
- GaN Semipolar Superlattice
- Palabra clave (fr)
- Analyse diffraction RX Composé III-V Couche mince Dislocation filetée Défaut empilement Mesure température Microscopie force atomique Microscopie électronique transmission Méthode MOCVD Nitrure de gallium Perfection cristalline Photoluminescence Recombinaison non radiative Semiconducteur III-V Superréseau 6172N 6855J 8105E 8115G GaN
- Palabra clave (in)
- X-ray diffraction analysis III-V compound Thin films Threading dislocation Stacking faults Temperature measurement Atomic force microscopy Transmission electron microscopy MOCVD Gallium nitride Crystal perfection Photoluminescence Non radiative recombination III-V semiconductors Superlattices
- Palabra clave (es)
- Compuesto III-V Dislocación aterrajada Galio nitruro Perfección cristalina Recombinación no radiativa
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A72 Defects and impurities in crystals; microstructure / 001B60A72N Stacking faults and other planar or extended defects
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05H Other semiconductors
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
- Disciplina
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 25614405
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2011.09.049 
https://dx.doi.org/10.1016/j.tsf.2011.09.049
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