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Responsivity determination of a hydrogenated amorphous silicon micro-bolometer array

Author
ORDUNA-DIAZ, A1 ; ROJAS-LOPEZ, M1 ; DELGADO-MACUIL, R1 ; TORRES-JACOME, Alfonso2 ; DE LA HIDALGA-W, F. J2 ; FERRUSCA, Daniel2 ; VENTURA-GONZALEZ, Salvador2 ; TREVINO-PAIACIOS, C. G2
[1] Centro de lnvestigación en Biotecnologia Aplicada (CIBA), IPN, Tlaxcala, Tlax. 72197, Mexico
[2] Instituto Nacional de Astrofisica, Optica y Electrónica Apdo. Postal 51 y 216, Puebla Pue 72000, Mexico
Conference title
22nd Congress of the International Commission for Optics (light for the development of the world)
Conference name
International Commission for Optics. Congress (22 ; Puebla de Zaragoza 2011-08-15)
Author (monograph)
Rodríguez-Vera, Ramón (Editor); Díaz-Uribe, Rufino (Editor)
International Commission for Optics (Organiser of meeting)
Centro de Investigaciones en Optica, León, Guanajuato, Mexico (Organiser of meeting)
Consejo Nacional de Ciencia y Tecnología, Mexico (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 8011 ; 80111V.1-80111V.6 ; 4 ; ref : 13 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-8585-4
Scientific domain
Electronics; Imagery; Metrology and instrumentation; Optics; Physics
Publisher
SPIE, Bellingham WA
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Bolomètre Composé binaire Détecteur IR Détecteur rayonnement Fonction réponse Lithographie Microbolomètre Microusinage Nitrure Pixel Semiconducteur amorphe Silicium Nitrure Silicium 0130C 0757K N Si Si3N4
Keyword (en)
Bolometers Binary compounds Infrared detectors Radiation detectors Response functions Lithography Microbolometers Micromachining Nitrides Pixel Amorphous semiconductors Silicon Nitrides Silicon
Keyword (es)
Pixel
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00A Communication, education, history, and philosophy / 001B00A30 Physics literature and publications / 001B00A30C Conference proceedings

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G57 Infrared, submillimeter wave, microwave and radiowave instruments, equipment and techniques / 001B00G57K Bolometer; infrared, submillimeter wave, microwave and radiowave receivers and detectors

Discipline
Metrology Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
25670659

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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